Senay, VolkanOzen, SonerPat, SuatKorkmaz, Sadan2024-10-042024-10-042015978-1-4799-6974-6http://hdl.handle.net/20.500.12403/3184IEEE International Conference on Plasma Sciences (ICOPS) -- MAY 24-28, 2015 -- Belek, TURKEY[Abstract Not Available]eninfo:eu-repo/semantics/closedAccessDIRECT AND FAST GROWTH OF A SI:GAAS THIN FILM BY MEANS OF THERMIONIC VACUUM ARC (TVA)Conference ObjectWOS:000380482200306N/A