Pat, SuatOzen, SonerSenay, VolkanKorkmaz, SadanPat, Zerrin2024-10-042024-10-042015978-1-4799-6974-6http://hdl.handle.net/20.500.12403/3687IEEE International Conference on Plasma Sciences (ICOPS) -- MAY 24-28, 2015 -- Belek, TURKEY[Abstract Not Available]eninfo:eu-repo/semantics/closedAccessSOLID STATE BATTERY MANUFACTURING WITH THERMIONIC VACUUM ARC AND RF SPUTTERINGConference ObjectWOS:000380482200043N/A