Ozen, SonerSenay, Volkan2024-10-042024-10-0420200030-40261618-1336https://doi.org/10.1016/j.ijleo.2019.163433http://hdl.handle.net/20.500.12403/3537In this research, two transparent chromium oxide thin films having different thickness values were simultaneously deposited on glass substrates by adjusting target-substrate distance by means of radio frequency (RF) magnetron sputtering technique. The effect of film thickness on optical, morphological and nano-mechanical properties of the produced thin films were analyzed by using UV-VIS spectrophotometer, interferometer, tensiometer and atomic force microscope. The transmittance and absorbance of the films were measured in the incident photon wavelength range of 300-1000 nm. The optical energy band gap value of the produced thin films was estimated to be approximately 4 eV from the obtained absorbance data via Tauc's method. According to the results obtained from nano-mechanical tests, the produced thin films were highly scratch resistant. From the wetting experiments, it was found that the surfaces of the films were hydrophilic.eninfo:eu-repo/semantics/closedAccessChromium oxideThin filmRF magnetron sputteringOptical propertiesMorphological propertiesMechanical propertiesArticle20110.1016/j.ijleo.2019.1634332-s2.0-85073057209Q2WOS:000506318200035Q2