Şenay, Volkan2024-10-042024-10-0420192146-05742536-4618https://doi.org/10.21597/jist.513363https://search.trdizin.gov.tr/tr/yayin/detay/440937http://hdl.handle.net/20.500.12403/4396In this study, two gold/palladium (Au/Pd) thin films having 20 nm and 80 nm thicknessvalues were simultaneously deposited on glass substrates by adjusting target-substrate distance viaradio frequency (RF) magnetron sputtering technique. The optical and surface properties of theproduced thin films were investigated by using UV-VIS spectrophotometer, interferometer,tensiometer and atomic force microscope. The effects of film thickness on the investigated propertiesof the thin films were reported.eninfo:eu-repo/semantics/openAccessArticle931377138410.21597/jist.513363440937