Özen S.Bilgiç E.Gülmez G.Şenay V.Pat S.Korkmaz Ş.Mohammadigharehbagh R.20.04.20192019-04-2020.04.20192019-04-2020169.78074E+120094-243Xhttps://dx.doi.org/10.1063/1.4944267https://hdl.handle.net/20.500.12403/6319th International Physics Conference of the Balkan Physical Union, BPU 2015In this study, AlGaN acoustic sensor was deposited on aluminum metal substrate by thermionic vacuum arc (TVA) method for the first time. Gallium materials are used in many applications for optoelectronic device and semiconductor technology. Thermionic vacuum arc is the deposition technology for the variously materials and applications field. The thickness of the acoustic sensor is in deposited as nano layer. Impedance analyses were realized. Also, TVA production parameters and some properties of the deposited layers were investigated. TVA is a fast deposition technology for the gallium compounds and doped gallium compounds. Obtained results show that AlGaN materials are very promising materials. Moreover, these acoustic sensors have been produced by TVA technology. © 2016 AIP Publishing LLC.eninfo:eu-repo/semantics/closedAccessConference Object172210.1063/1.49442672-s2.0-84984573052N/AWOS:000375923300148N/A