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Investigation of the thickness effect to impedance analysis results AlGaN acoustic sensor

Özen S.; Bilgiç E.; Gülmez G.; Şenay V.; Pat S.; Korkmaz Ş.; Mohammadigharehbagh R. (American Institute of Physics Inc., 2016)

In this study, AlGaN acoustic sensors were deposited on aluminum metal substrate by thermionic vacuum arc (TVA) method, for the first time. Impedance analyses of the fabricated acoustic sensors were investigated for the ...

Impedance analysis of nano thickness layered AlGaN acoustic sensor deposited by thermionic vacuum arc

Özen S.; Bilgiç E.; Gülmez G.; Şenay V.; Pat S.; Korkmaz Ş.; Mohammadigharehbagh R. (American Institute of Physics Inc., 2016)

In this study, AlGaN acoustic sensor was deposited on aluminum metal substrate by thermionic vacuum arc (TVA) method for the first time. Gallium materials are used in many applications for optoelectronic device and ...