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Toplam kayıt 2, listelenen: 1-2
Investigation on the morphology and surface free energy of the AlGaN thin film
(Elsevier Ltd, 2015)
The purpose of this paper is to analyze surface properties of AlGaN thin film produced using thermionic vacuum arc technique. Thermionic vacuum arc is an alternative deposition technique for GaN thin films that produces ...
Some physical properties of the SiGe thin film coatings by thermionic vacuum arc (TVA)
(American Scientific Publishers, 2015)
SiGe thin films were deposited on glass and PET substrate by the thermionic vacuum arc (TVA) method for the first time. TVA is an anodic plasma generator which works in high vacuum conditions. Highly pure and quality films ...