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A study on optical, morphological and mechanical properties of Al2O3 ultra-thin films deposited by RF reactive magnetron sputtering

Pat S.; Özen S.; Şenay V.; Aydo?muş T.; Elmas S.; Korkmaz Ş.; Ekem N.; Balba? M.Z. (Inderscience Enterprises Ltd., 2015)

The Al2O3 ultra-thin films with the thicknesses of 30 nm and 35 nm were deposited on glass microscope slides by a radio frequency reactive magnetron sputtering system. The optical, morphological and mechanical properties ...

ZnO thin film synthesis by reactive radio frequency magnetron sputtering

Şenay V.; Pat S.; Korkmaz Ş.; Aydo?muş T.; Elmas S.; Özen S.; Ekem N.; Balba? M.Z. (Elsevier B.V., 2014)

In this study, ZnO thin films were deposited on glass substrates by reactive RF magnetron sputtering method at argon-oxygen gas mixing (1:1) atmosphere. Some properties of the synthesized films were investigated by ...