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Influence of RF power on optical and surface properties of the ZnO thin films deposited by magnetron sputtering

Pat S.; Şenay V.; Özen S.; Korkmaz S.; Geçici B. (American Scientific Publishers, 2015)

The influences of the effects of sputtering power on the optical and structural properties of ZnO thin films were investigated. The ZnO layers were deposited on glass slides by RF magnetron sputtering. RF sputtering powers ...