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The Al doping effect on the surface, optical, electrical and nanomechanical properties of the ZnO and AZO thin films prepared by RF sputtering technique

Pat S.; Mohammadigharehbagh R.; Özen S.; Şenay V.; Yudar H.H.; Korkmaz Ş. (Elsevier Ltd, 2017)

In this study, ZnO and aluminum doped ZnO (AZO) thin films were deposited at constant RF power of 100 W for the determine of the structural, surface, optical, electrical and nanomechanical properties. X–Ray diffraction ...