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Toplam kayıt 2, listelenen: 1-2
A study on optical, morphological and mechanical properties of Al2O3 ultra-thin films deposited by RF reactive magnetron sputtering
(Inderscience Enterprises Ltd., 2015)
The Al2O3 ultra-thin films with the thicknesses of 30 nm and 35 nm were deposited on glass microscope slides by a radio frequency reactive magnetron sputtering system. The optical, morphological and mechanical properties ...
Influence of RF power on optical and surface properties of the ZnO thin films deposited by magnetron sputtering
(American Scientific Publishers, 2015)
The influences of the effects of sputtering power on the optical and structural properties of ZnO thin films were investigated. The ZnO layers were deposited on glass slides by RF magnetron sputtering. RF sputtering powers ...