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Now showing items 11-14 of 14

GaN thin film deposition on glass and PET substrates by thermionic vacuum arc (TVA)

Pat S.; Korkmaz Ş.; Özen S.; Şenay V. (Elsevier Ltd, 2015)

In this paper, GaN thin film production was realized by thermionic vacuum arc (TVA), a plasma deposition technique, for the first time. We present a new deposition mechanism for GaN thin films with a very short production ...

A study on optical, morphological and mechanical properties of Al2O3 ultra-thin films deposited by RF reactive magnetron sputtering

Pat S.; Özen S.; Şenay V.; Aydo?muş T.; Elmas S.; Korkmaz Ş.; Ekem N.; Balba? M.Z. (Inderscience Enterprises Ltd., 2015)

The Al2O3 ultra-thin films with the thicknesses of 30 nm and 35 nm were deposited on glass microscope slides by a radio frequency reactive magnetron sputtering system. The optical, morphological and mechanical properties ...

Some physical properties of the SiGe thin film coatings by thermionic vacuum arc (TVA)

Özen S.; Pat S.; Şenay V.; Korkmaz Ş.; Geçici B. (American Scientific Publishers, 2015)

SiGe thin films were deposited on glass and PET substrate by the thermionic vacuum arc (TVA) method for the first time. TVA is an anodic plasma generator which works in high vacuum conditions. Highly pure and quality films ...

ZnO thin film synthesis by reactive radio frequency magnetron sputtering

Şenay V.; Pat S.; Korkmaz Ş.; Aydo?muş T.; Elmas S.; Özen S.; Ekem N.; Balba? M.Z. (Elsevier B.V., 2014)

In this study, ZnO thin films were deposited on glass substrates by reactive RF magnetron sputtering method at argon-oxygen gas mixing (1:1) atmosphere. Some properties of the synthesized films were investigated by ...