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A study on optical, morphological and mechanical properties of Al2O3 ultra-thin films deposited by RF reactive magnetron sputtering

Pat S.; Özen S.; Şenay V.; Aydo?muş T.; Elmas S.; Korkmaz Ş.; Ekem N.; Balba? M.Z. (Inderscience Enterprises Ltd., 2015)

The Al2O3 ultra-thin films with the thicknesses of 30 nm and 35 nm were deposited on glass microscope slides by a radio frequency reactive magnetron sputtering system. The optical, morphological and mechanical properties ...

Some physical properties of the SiGe thin film coatings by thermionic vacuum arc (TVA)

Özen S.; Pat S.; Şenay V.; Korkmaz Ş.; Geçici B. (American Scientific Publishers, 2015)

SiGe thin films were deposited on glass and PET substrate by the thermionic vacuum arc (TVA) method for the first time. TVA is an anodic plasma generator which works in high vacuum conditions. Highly pure and quality films ...

Influence of RF power on optical and surface properties of the ZnO thin films deposited by magnetron sputtering

Pat S.; Şenay V.; Özen S.; Korkmaz S.; Geçici B. (American Scientific Publishers, 2015)

The influences of the effects of sputtering power on the optical and structural properties of ZnO thin films were investigated. The ZnO layers were deposited on glass slides by RF magnetron sputtering. RF sputtering powers ...

ZnO thin film synthesis by reactive radio frequency magnetron sputtering

Şenay V.; Pat S.; Korkmaz Ş.; Aydo?muş T.; Elmas S.; Özen S.; Ekem N.; Balba? M.Z. (Elsevier B.V., 2014)

In this study, ZnO thin films were deposited on glass substrates by reactive RF magnetron sputtering method at argon-oxygen gas mixing (1:1) atmosphere. Some properties of the synthesized films were investigated by ...