• Türkçe
    • English
  • English 
    • Türkçe
    • English
  • Login
View Item 
  •   DSpace@Bayburt
  • Araştırma Çıktıları | TR-Dizin | WoS | Scopus | PubMed
  • Scopus İndeksli Yayınlar Koleksiyonu
  • View Item
  •   DSpace@Bayburt
  • Araştırma Çıktıları | TR-Dizin | WoS | Scopus | PubMed
  • Scopus İndeksli Yayınlar Koleksiyonu
  • View Item
JavaScript is disabled for your browser. Some features of this site may not work without it.

The surface morphology research of the BGaN thin films deposited by thermionic vacuum arc

Date

2017

Author

Özen S.
Pat S.
Şenay V.
Korkmaz Ş.

Metadata

Show full item record

Abstract

In this paper, BGaN thin films with two different thicknesses were deposited on two different substrates and their surface morphologies were investigated. The amorphous glass and semi-crystalline polyethylene terephthalate substrates were selected. At the same time, two different deposition angles are selected with a view to the effect of deposition angle on surface morphology. The surface and optical properties were determined by using X-ray diffractometer (XRD), atomic force microscope (AFM), spectroscopic ellipsometry (SE) and optical interferometer. The thicknesses of thin films on substrates are about 30 nm and 40 nm. According to the atomic force microscope images, small-dimensional grains observed on relatively large grains. The roughness values of the thin films on the polyethylene terephthalate substrate are lower than on the glass substrate. © 2016 Elsevier Ltd

Source

Vacuum

Volume

135

URI

https://dx.doi.org/10.1016/j.vacuum.2016.10.033
https://hdl.handle.net/20.500.12403/550

Collections

  • Scopus İndeksli Yayınlar Koleksiyonu [570]
  • WoS İndeksli Yayınlar Koleksiyonu [372]

Related items

Showing items related by title, author, creator and subject.

  • The influence of voltage applied between the electrodes on optical and morphological properties of the InGaN thin films grown by thermionic vacuum arc 

    Özen S.; Şenay V.; Pat S.; Korkmaz Ş. (John Wiley and Sons Inc., 2016)
    The aim of this research is to investigate the optical and morphological properties of the InGaN thin films deposited onto amorphous glass substrates in two separate experiments with two different voltages applied between ...
  • GaN thin film deposition on glass and PET substrates by thermionic vacuum arc (TVA) 

    Pat S.; Korkmaz Ş.; Özen S.; Şenay V. (Elsevier Ltd, 2015)
    In this paper, GaN thin film production was realized by thermionic vacuum arc (TVA), a plasma deposition technique, for the first time. We present a new deposition mechanism for GaN thin films with a very short production ...
  • Heavily carbon doped GaAs nanocrystalline thin film deposited by thermionic vacuum arc method 

    Pat S.; Korkmaz Ş.; Özen S.; Şenay V. (Elsevier Ltd, 2016)
    In this paper, we introduced a new different thin film deposition method for heavily carbon doped GaAs. Used method is thermionic vacuum arc (TVA) and first used for the carbon doping process. The method is very fast ...



DSpace software copyright © 2002-2015  DuraSpace
Contact Us | Send Feedback
Theme by 
@mire NV
 

 




| Policy | Guide | Contact |
DSpace@Bayburt

by OpenAIRE
Advanced Search

sherpa/romeo

Browse

All of DSpaceCommunities & CollectionsBy Issue DateAuthorsTitlesSubjectsTypeLanguageDepartmentCategoryPublisherAccess TypeInstitution AuthorThis CollectionBy Issue DateAuthorsTitlesSubjectsTypeLanguageDepartmentCategoryPublisherAccess TypeInstitution Author

My Account

LoginRegister

Statistics

View Google Analytics Statistics

DSpace software copyright © 2002-2015  DuraSpace
Contact Us | Send Feedback
Theme by 
@mire NV
 

 


|| Policy || Guide || Library || Bayburt University || OAI-PMH ||

Bayburt Üniversitesi Kütüphane ve Dokümantasyon Daire Başkanlığı, Bayburt, Turkey
If you find any errors in content, please contact: kutuphane@bayburt.edu.tr

Creative Commons License
DSpace@Bayburt by Bayburt University Institutional Repository is licensed under a Creative Commons Attribution-NonCommercial-NoDerivs 3.0 Unported License..

DSpace@Bayburt:


DSpace 6.2

tarafından İdeal DSpace hizmetleri çerçevesinde özelleştirilerek kurulmuştur.