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Impedance analysis of nano thickness layered AlGaN acoustic sensor deposited by thermionic vacuum arc

dc.contributor.authorÖzen S.
dc.contributor.authorBilgiç E.
dc.contributor.authorGülmez G.
dc.contributor.authorŞenay V.
dc.contributor.authorPat S.
dc.contributor.authorKorkmaz Ş.
dc.contributor.authorMohammadigharehbagh R.
dc.date.accessioned20.04.201910:49:12
dc.date.accessioned2019-04-20T21:43:38Z
dc.date.available20.04.201910:49:12
dc.date.available2019-04-20T21:43:38Z
dc.date.issued2016
dc.identifier.isbn9780735413696
dc.identifier.issn0094-243X
dc.identifier.urihttps://dx.doi.org/10.1063/1.4944267
dc.identifier.urihttps://hdl.handle.net/20.500.12403/631
dc.description9th International Physics Conference of the Balkan Physical Union, BPU 2015
dc.description.abstractIn this study, AlGaN acoustic sensor was deposited on aluminum metal substrate by thermionic vacuum arc (TVA) method for the first time. Gallium materials are used in many applications for optoelectronic device and semiconductor technology. Thermionic vacuum arc is the deposition technology for the variously materials and applications field. The thickness of the acoustic sensor is in deposited as nano layer. Impedance analyses were realized. Also, TVA production parameters and some properties of the deposited layers were investigated. TVA is a fast deposition technology for the gallium compounds and doped gallium compounds. Obtained results show that AlGaN materials are very promising materials. Moreover, these acoustic sensors have been produced by TVA technology. © 2016 AIP Publishing LLC.en_US
dc.language.isoengen_US
dc.publisherAmerican Institute of Physics Inc.
dc.relation.isversionof10.1063/1.4944267
dc.rightsinfo:eu-repo/semantics/closedAccessen_US
dc.titleImpedance analysis of nano thickness layered AlGaN acoustic sensor deposited by thermionic vacuum arcen_US
dc.typeconferenceObjecten_US
dc.relation.journalAIP Conference Proceedingsen_US
dc.contributor.departmentBayburt Universityen_US
dc.contributor.authorID55897767500
dc.contributor.authorID6603177625
dc.contributor.authorID6508388042
dc.contributor.authorID55897416100
dc.contributor.authorID9274843500
dc.contributor.authorID7003415405
dc.contributor.authorID57189905524
dc.identifier.volume1722
dc.relation.publicationcategoryKonferans Öğesi - Uluslararası - Kurum Öğretim Elemanıen_US


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