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Deposition of a Mo doped GaN thin film on glass substrate by thermionic vacuum arc (TVA)

Date

2015

Author

Özen S.
Şenay V.
Pat S.
Korkmaz Ş.

Metadata

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Abstract

Current research presents a new deposition method for GaN thin films that produces in a very short production time for GaN-based solid-state applications. A Mo doped GaN thin film on a glass substrate was produced by thermionic vacuum arc (TVA) technique. The TVA technique is a novel non-reactive plasma technique. The optical properties were determined by Filmetrics F20 interferometer and UV–Vis double beam spectrophotometer. The surface morphology was analyzed using field emission scanning electron microscopy and atomic force microscopy. The mean thickness value was measured as 100 nm by Filmetrics interferometer. The crystalline structure of the produced thin film has a Wurtzite crystal structure (004) as obtained by X-ray diffraction. Hardness value was determined as 14 GPa with the Oliver–Pharr method. The obtained properties are consistent with the values reported in related literature. The findings indicate that the TVA method provides advantages for optical and industrial applications. © 2015, Springer Science+Business Media New York.

Source

Journal of Materials Science: Materials in Electronics

Volume

26

Issue

7

URI

https://dx.doi.org/10.1007/s10854-015-3027-y
https://hdl.handle.net/20.500.12403/688

Collections

  • Scopus İndeksli Yayınlar Koleksiyonu [570]
  • WoS İndeksli Yayınlar Koleksiyonu [372]

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  • Direct and fast growth of GaAs thin films on glass and polyethylene terephthalate substrates using a thermionic vacuum arc 

    Pat S.; Korkmaz Ş.; Özen S.; Şenay V. (Springer New York LLC, 2015)
    Using a thermionic vacuum arc, single?crystal gallium arsenide (GaAs) layers of micron thickness were grown on PET and glass substrates in 2 min. We present a new deposition mechanism and parameters for GaAs thin films ...
  • The influence of voltage applied between the electrodes on optical and morphological properties of the InGaN thin films grown by thermionic vacuum arc 

    Özen S.; Şenay V.; Pat S.; Korkmaz Ş. (John Wiley and Sons Inc., 2016)
    The aim of this research is to investigate the optical and morphological properties of the InGaN thin films deposited onto amorphous glass substrates in two separate experiments with two different voltages applied between ...
  • The surface morphology research of the BGaN thin films deposited by thermionic vacuum arc 

    Özen S.; Pat S.; Şenay V.; Korkmaz Ş. (Elsevier Ltd, 2017)
    In this paper, BGaN thin films with two different thicknesses were deposited on two different substrates and their surface morphologies were investigated. The amorphous glass and semi-crystalline polyethylene terephthalate ...



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