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A new method for titania thin film production: Thermionic vacuum arc method
(SAGE Publications Ltd, 2017)
In this research, transparent titania (TiO2) thin films were deposited on a glass microscope slide and on a flexible polyethylene terephthalate (PET) substrate under a high vacuum condition by means of the thermionic vacuum ...
Influence of oxygen partial pressure on the metastable copper oxide thin films
(World Scientific Publishing Co. Pte Ltd, 2016)
Paramelaconite (Cu4O3) is a metastable copper oxide. Metastable copper oxide thin films were deposited on glass substrates by reactive RF magnetron sputtering in argon (Ar) and oxygen (O2) gas mixture atmospheres. Ar/O2 ...
Some physical properties of the SiGe thin film coatings by thermionic vacuum arc (TVA)
(American Scientific Publishers, 2015)
SiGe thin films were deposited on glass and PET substrate by the thermionic vacuum arc (TVA) method for the first time. TVA is an anodic plasma generator which works in high vacuum conditions. Highly pure and quality films ...