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A new method for titania thin film production: Thermionic vacuum arc method

Date

2017

Author

Şenay V.
Özen S.
Pat S.
Geçici B.
Korkmaz Ş.

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Abstract

In this research, transparent titania (TiO2) thin films were deposited on a glass microscope slide and on a flexible polyethylene terephthalate (PET) substrate under a high vacuum condition by means of the thermionic vacuum arc (TVA) method in a very short period of time (60 s). Optical properties and surface properties of the coated TiO2 surfaces are related to the structural changes of the coated layers due to ion energies and substrate effect. But obtained results are closely linked to literature values. Our analysis showed that the TVA method is an alternative method for low-temperature coatings and the produced films present important advantages for optical and industrial applications. © SAGE Publications.

Source

Journal of Thermoplastic Composite Materials

Volume

30

Issue

6

URI

https://dx.doi.org/10.1177/0892705715614060
https://hdl.handle.net/20.500.12403/491

Collections

  • Scopus İndeksli Yayınlar Koleksiyonu [570]
  • WoS İndeksli Yayınlar Koleksiyonu [372]

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  • The influence of voltage applied between the electrodes on optical and morphological properties of the InGaN thin films grown by thermionic vacuum arc 

    Özen S.; Şenay V.; Pat S.; Korkmaz Ş. (John Wiley and Sons Inc., 2016)
    The aim of this research is to investigate the optical and morphological properties of the InGaN thin films deposited onto amorphous glass substrates in two separate experiments with two different voltages applied between ...
  • GaN thin film deposition on glass and PET substrates by thermionic vacuum arc (TVA) 

    Pat S.; Korkmaz Ş.; Özen S.; Şenay V. (Elsevier Ltd, 2015)
    In this paper, GaN thin film production was realized by thermionic vacuum arc (TVA), a plasma deposition technique, for the first time. We present a new deposition mechanism for GaN thin films with a very short production ...
  • Optical and surface properties of the in doped GaAs layer deposition using thermionic vacuum arc method 

    Pat S.; Özen S.; Şenay V.; Korkmaz Ş.; Şimşek V. (John Wiley and Sons Inc., 2016)
    A broadband optical transparent InGaAs semiconductor layer production of micron thicknesses was produced in only 75 s by thermionic vacuum arc (TVA) method at the first time. The optical and surface properties of the ...



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