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AlGaAs film growth using thermionic vacuum arc (TVA) and determination of its physical properties
(Springer Verlag, 2015)
In this research, an AlGaAs film was deposited on a microscope slide by means of the thermionic vacuum arc (TVA) technique which is a novel plasma production technique. AlGaAs structures were grown by this deposition ...
Optical and surface properties of LiFePO<inf>4</inf> thin films prepared by RF magnetron sputtering
(Springer New York LLC, 2015)
LiFePO<inf>4</inf> thin films with thickness values of 65 nm and 70 nm were deposited onto glass substrates by RF magnetron sputtering, using a LiFePO<inf>4</inf> target in the argon atmosphere. A comprehensive study of ...
Direct and fast growth of GaAs thin films on glass and polyethylene terephthalate substrates using a thermionic vacuum arc
(Springer New York LLC, 2015)
Using a thermionic vacuum arc, single?crystal gallium arsenide (GaAs) layers of micron thickness were grown on PET and glass substrates in 2 min. We present a new deposition mechanism and parameters for GaAs thin films ...
GaN thin film deposition on glass and PET substrates by thermionic vacuum arc (TVA)
(Elsevier Ltd, 2015)
In this paper, GaN thin film production was realized by thermionic vacuum arc (TVA), a plasma deposition technique, for the first time. We present a new deposition mechanism for GaN thin films with a very short production ...
A study on optical, morphological and mechanical properties of Al2O3 ultra-thin films deposited by RF reactive magnetron sputtering
(Inderscience Enterprises Ltd., 2015)
The Al2O3 ultra-thin films with the thicknesses of 30 nm and 35 nm were deposited on glass microscope slides by a radio frequency reactive magnetron sputtering system. The optical, morphological and mechanical properties ...
Some physical properties of the SiGe thin film coatings by thermionic vacuum arc (TVA)
(American Scientific Publishers, 2015)
SiGe thin films were deposited on glass and PET substrate by the thermionic vacuum arc (TVA) method for the first time. TVA is an anodic plasma generator which works in high vacuum conditions. Highly pure and quality films ...
Influence of RF power on optical and surface properties of the ZnO thin films deposited by magnetron sputtering
(American Scientific Publishers, 2015)
The influences of the effects of sputtering power on the optical and structural properties of ZnO thin films were investigated. The ZnO layers were deposited on glass slides by RF magnetron sputtering. RF sputtering powers ...
ZnO thin film synthesis by reactive radio frequency magnetron sputtering
(Elsevier B.V., 2014)
In this study, ZnO thin films were deposited on glass substrates by reactive RF magnetron sputtering method at argon-oxygen gas mixing (1:1) atmosphere. Some properties of the synthesized films were investigated by ...
