ZnO thin film synthesis by reactive radio frequency magnetron sputtering
Özet
In this study, ZnO thin films were deposited on glass substrates by reactive RF magnetron sputtering method at argon-oxygen gas mixing (1:1) atmosphere. Some properties of the synthesized films were investigated by interferometry, UV-vis spectrophotometer, atomic force microscopy, and tensiometer. Tauc method was adopted to estimate the optical band gaps. The band gaps of the deposited films were affected by film thickness. We concluded that the surface composition plays a substantial role in the values of the band gaps. Nanocrystalline structures were detected in all produced samples. © 2013 Elsevier B.V. All rights reserved.
Kaynak
Applied Surface ScienceCilt
318Koleksiyonlar
İlgili Öğeler
Başlık, yazar, küratör ve konuya göre gösterilen ilgili öğeler.
-
A study on optical, morphological and mechanical properties of Al2O3 ultra-thin films deposited by RF reactive magnetron sputtering
Pat S.; Özen S.; Şenay V.; Aydo?muş T.; Elmas S.; Korkmaz Ş.; Ekem N.; Balba? M.Z. (Inderscience Enterprises Ltd., 2015)The Al2O3 ultra-thin films with the thicknesses of 30 nm and 35 nm were deposited on glass microscope slides by a radio frequency reactive magnetron sputtering system. The optical, morphological and mechanical properties ... -
Morphology, composition, structure and optical properties of CuO/Cu2O thin films prepared by RF sputtering method
Korkmaz Ş.; Geçici B.; Korkmaz S.D.; Mohammadigharehbagh R.; Pat S.; Özen S.; Şenay V.; Yudar H.H. (Elsevier Ltd, 2016)In this paper, copper oxide (CuO/Cu2O) nanocrystalline thin films were deposited by radio frequency (RF) magnetron sputtering system at 75 W and 100 W. The surface, optical, composition and structural properties of obtaining ... -
Influence of RF power on optical and surface properties of the ZnO thin films deposited by magnetron sputtering
Pat S.; Şenay V.; Özen S.; Korkmaz S.; Geçici B. (American Scientific Publishers, 2015)The influences of the effects of sputtering power on the optical and structural properties of ZnO thin films were investigated. The ZnO layers were deposited on glass slides by RF magnetron sputtering. RF sputtering powers ...