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    A study on optical, morphological and mechanical properties of Al2O3 ultra-thin films deposited by RF reactive magnetron sputtering
    (Inderscience Enterprises Ltd., 2015) Pat S.; Özen S.; Şenay V.; Aydo?muş T.; Elmas S.; Korkmaz Ş.; Ekem N.; Balba? M.Z.
    The Al2O3 ultra-thin films with the thicknesses of 30 nm and 35 nm were deposited on glass microscope slides by a radio frequency reactive magnetron sputtering system. The optical, morphological and mechanical properties were investigated as function of the film thickness. The refractive index of the resulting Al2O3 ultra-thin film increased with the increasing thickness. Both the films showed high transparency of > 85% and low reflectivity of < 10% in the visible and near infrared region. A band gap of ?8.65 eV was obtained for the 30 nm film and ?7.53 eV for the 35 nm film from an empirical relation between refractive index and band gap. According to the results obtained from the AFM studies, the root mean square surface roughness of the films are 3.67 nm and 3.77 nm for the 30 nm and 35 nm film, respectively. The hardness and Young modulus values decreased with the increasing film thickness. Copyright © 2015 Inderscience Enterprises Ltd.
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    ZnO thin film synthesis by reactive radio frequency magnetron sputtering
    (Elsevier B.V., 2014) Şenay V.; Pat S.; Korkmaz Ş.; Aydo?muş T.; Elmas S.; Özen S.; Ekem N.; Balba? M.Z.
    In this study, ZnO thin films were deposited on glass substrates by reactive RF magnetron sputtering method at argon-oxygen gas mixing (1:1) atmosphere. Some properties of the synthesized films were investigated by interferometry, UV-vis spectrophotometer, atomic force microscopy, and tensiometer. Tauc method was adopted to estimate the optical band gaps. The band gaps of the deposited films were affected by film thickness. We concluded that the surface composition plays a substantial role in the values of the band gaps. Nanocrystalline structures were detected in all produced samples. © 2013 Elsevier B.V. All rights reserved.