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Characterization of a fast grown GaAs:Sn thin film by thermionic vacuum arc

Özen S.; Şenay V.; Pat S.; Korkmaz Ş. (Springer New York LLC, 2015)

In this research, a tin doped gallium arsenide thin film was grown on a glass substrate by means of the TVA technique in a very short period of time (70 s) and it’s morphological, compositional, and optical properties were ...

Investigation on the morphology and surface free energy of the AlGaN thin film

Özen S.; Şenay V.; Pat S.; Korkmaz Ş. (Elsevier Ltd, 2015)

The purpose of this paper is to analyze surface properties of AlGaN thin film produced using thermionic vacuum arc technique. Thermionic vacuum arc is an alternative deposition technique for GaN thin films that produces ...

Deposition of a Mo doped GaN thin film on glass substrate by thermionic vacuum arc (TVA)

Özen S.; Şenay V.; Pat S.; Korkmaz Ş. (Springer New York LLC, 2015)

Current research presents a new deposition method for GaN thin films that produces in a very short production time for GaN-based solid-state applications. A Mo doped GaN thin film on a glass substrate was produced by ...

Direct and fast growth of GaAs thin films on glass and polyethylene terephthalate substrates using a thermionic vacuum arc

Pat S.; Korkmaz Ş.; Özen S.; Şenay V. (Springer New York LLC, 2015)

Using a thermionic vacuum arc, single?crystal gallium arsenide (GaAs) layers of micron thickness were grown on PET and glass substrates in 2 min. We present a new deposition mechanism and parameters for GaAs thin films ...

GaN thin film deposition on glass and PET substrates by thermionic vacuum arc (TVA)

Pat S.; Korkmaz Ş.; Özen S.; Şenay V. (Elsevier Ltd, 2015)

In this paper, GaN thin film production was realized by thermionic vacuum arc (TVA), a plasma deposition technique, for the first time. We present a new deposition mechanism for GaN thin films with a very short production ...

A study on optical, morphological and mechanical properties of Al2O3 ultra-thin films deposited by RF reactive magnetron sputtering

Pat S.; Özen S.; Şenay V.; Aydo?muş T.; Elmas S.; Korkmaz Ş.; Ekem N.; Balba? M.Z. (Inderscience Enterprises Ltd., 2015)

The Al2O3 ultra-thin films with the thicknesses of 30 nm and 35 nm were deposited on glass microscope slides by a radio frequency reactive magnetron sputtering system. The optical, morphological and mechanical properties ...

Some physical properties of the SiGe thin film coatings by thermionic vacuum arc (TVA)

Özen S.; Pat S.; Şenay V.; Korkmaz Ş.; Geçici B. (American Scientific Publishers, 2015)

SiGe thin films were deposited on glass and PET substrate by the thermionic vacuum arc (TVA) method for the first time. TVA is an anodic plasma generator which works in high vacuum conditions. Highly pure and quality films ...