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Optical and Surface Characteristics of Mg-Doped GaAs Nanocrystalline Thin Film Deposited by Thermionic Vacuum Arc Technique

Date

2017

Author

Pat S.
Özen S.
Şenay V.
Korkmaz Ş.

Metadata

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Abstract

Magnesium (Mg) is the most promising p-type dopant for gallium arsenide (GaAs) semiconductor technology. Mg-doped GaAs nanocrystalline thin film has been deposited at room temperature by the thermionic vacuum arc technique, a rapid deposition method for production of doped GaAs material. The microstructure and surface and optical properties of the deposited sample were investigated by x-ray diffraction analysis, scanning electron microscopy, energy-dispersive x-ray spectroscopy, atomic force microscopy, ultraviolet–visible spectrophotometry, and interferometry. The crystalline direction of the deposited sample was determined to be (220) plane and (331) plane at 44.53° and 72.30°, respectively. The Mg-doped GaAs nanocrystalline sample showed high transmittance. © 2016, The Minerals, Metals & Materials Society.

Source

Journal of Electronic Materials

Volume

46

Issue

1

URI

https://dx.doi.org/10.1007/s11664-016-4861-2
https://hdl.handle.net/20.500.12403/536

Collections

  • Scopus İndeksli Yayınlar Koleksiyonu [570]
  • WoS İndeksli Yayınlar Koleksiyonu [372]

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  • Heavily carbon doped GaAs nanocrystalline thin film deposited by thermionic vacuum arc method 

    Pat S.; Korkmaz Ş.; Özen S.; Şenay V. (Elsevier Ltd, 2016)
    In this paper, we introduced a new different thin film deposition method for heavily carbon doped GaAs. Used method is thermionic vacuum arc (TVA) and first used for the carbon doping process. The method is very fast ...
  • Optical and surface properties of the in doped GaAs layer deposition using thermionic vacuum arc method 

    Pat S.; Özen S.; Şenay V.; Korkmaz Ş.; Şimşek V. (John Wiley and Sons Inc., 2016)
    A broadband optical transparent InGaAs semiconductor layer production of micron thicknesses was produced in only 75 s by thermionic vacuum arc (TVA) method at the first time. The optical and surface properties of the ...
  • Morphology, composition, structure and optical properties of CuO/Cu2O thin films prepared by RF sputtering method 

    Korkmaz Ş.; Geçici B.; Korkmaz S.D.; Mohammadigharehbagh R.; Pat S.; Özen S.; Şenay V.; Yudar H.H. (Elsevier Ltd, 2016)
    In this paper, copper oxide (CuO/Cu2O) nanocrystalline thin films were deposited by radio frequency (RF) magnetron sputtering system at 75 W and 100 W. The surface, optical, composition and structural properties of obtaining ...



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