Optical, morphological and nano-mechanical properties of chromium oxide thin films fabricated by radio frequency (RF) magnetron sputtering

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dc.authoridOzen, Soner/0000-0002-2351-3234
dc.authoridSenay, Volkan/0000-0002-6579-2737
dc.contributor.authorOzen, Soner
dc.contributor.authorSenay, Volkan
dc.date.accessioned2024-10-04T18:52:32Z
dc.date.available2024-10-04T18:52:32Z
dc.date.issued2020
dc.departmentBayburt Üniversitesien_US
dc.description.abstractIn this research, two transparent chromium oxide thin films having different thickness values were simultaneously deposited on glass substrates by adjusting target-substrate distance by means of radio frequency (RF) magnetron sputtering technique. The effect of film thickness on optical, morphological and nano-mechanical properties of the produced thin films were analyzed by using UV-VIS spectrophotometer, interferometer, tensiometer and atomic force microscope. The transmittance and absorbance of the films were measured in the incident photon wavelength range of 300-1000 nm. The optical energy band gap value of the produced thin films was estimated to be approximately 4 eV from the obtained absorbance data via Tauc's method. According to the results obtained from nano-mechanical tests, the produced thin films were highly scratch resistant. From the wetting experiments, it was found that the surfaces of the films were hydrophilic.en_US
dc.identifier.doi10.1016/j.ijleo.2019.163433
dc.identifier.issn0030-4026
dc.identifier.issn1618-1336
dc.identifier.scopus2-s2.0-85073057209en_US
dc.identifier.scopusqualityQ2en_US
dc.identifier.urihttps://doi.org/10.1016/j.ijleo.2019.163433
dc.identifier.urihttp://hdl.handle.net/20.500.12403/3537
dc.identifier.volume201en_US
dc.identifier.wosWOS:000506318200035en_US
dc.identifier.wosqualityQ2en_US
dc.indekslendigikaynakWeb of Scienceen_US
dc.indekslendigikaynakScopusen_US
dc.language.isoenen_US
dc.publisherElsevier Gmbhen_US
dc.relation.ispartofOptiken_US
dc.relation.publicationcategoryMakale - Uluslararası Hakemli Dergi - Kurum Öğretim Elemanıen_US
dc.rightsinfo:eu-repo/semantics/closedAccessen_US
dc.subjectChromium oxideen_US
dc.subjectThin filmen_US
dc.subjectRF magnetron sputteringen_US
dc.subjectOptical propertiesen_US
dc.subjectMorphological propertiesen_US
dc.subjectMechanical propertiesen_US
dc.titleOptical, morphological and nano-mechanical properties of chromium oxide thin films fabricated by radio frequency (RF) magnetron sputteringen_US
dc.typeArticleen_US

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