Investigation of the thickness effect to impedance analysis results AlGaN acoustic sensor

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dc.authorid55897767500
dc.authorid6603177625
dc.authorid6508388042
dc.authorid55897416100
dc.authorid9274843500
dc.authorid7003415405
dc.authorid57189905524
dc.contributor.authorÖzen S.
dc.contributor.authorBilgiç E.
dc.contributor.authorGülmez G.
dc.contributor.authorŞenay V.
dc.contributor.authorPat S.
dc.contributor.authorKorkmaz Ş.
dc.contributor.authorMohammadigharehbagh R.
dc.date.accessioned20.04.201910:49:12
dc.date.accessioned2019-04-20T21:43:38Z
dc.date.available20.04.201910:49:12
dc.date.available2019-04-20T21:43:38Z
dc.date.issued2016
dc.departmentBayburt Üniversitesien_US
dc.description9th International Physics Conference of the Balkan Physical Union, BPU 2015
dc.description.abstractIn this study, AlGaN acoustic sensors were deposited on aluminum metal substrate by thermionic vacuum arc (TVA) method, for the first time. Impedance analyses of the fabricated acoustic sensors were investigated for the determining of effect of the nano layer thickness. Thickness values are very close to each others. Fabricated sensors have been fabricated from AlGaN deposited on aluminum substrates. Gallium materials are used in many applications for optoelectronic device and semiconductor technology. Thermionic vacuum arc is the deposition technology for the variously materials and applications field. TVA production parameters and some properties of the deposited layers were investigated. TVA is the fast deposition technology for the gallium compounds and doped gallium compounds. Obtained results that AlGaN layer are very promising material for an acoustic sensor but also TVA is proper fast technology for the production. © 2016 AIP Publishing LLC.en_US
dc.identifier.doi10.1063/1.4944266
dc.identifier.isbn9.78074E+12
dc.identifier.issn0094-243X
dc.identifier.scopus2-s2.0-84984535361en_US
dc.identifier.scopusqualityN/Aen_US
dc.identifier.urihttps://dx.doi.org/10.1063/1.4944266
dc.identifier.urihttps://hdl.handle.net/20.500.12403/632
dc.identifier.volume1722
dc.identifier.wosWOS:000375923300147en_US
dc.identifier.wosqualityN/Aen_US
dc.indekslendigikaynakWeb of Scienceen_US
dc.indekslendigikaynakScopusen_US
dc.language.isoenen_US
dc.publisherAmerican Institute of Physics Inc.
dc.relation.ispartofAIP Conference Proceedingsen_US
dc.relation.publicationcategoryKonferans Öğesi - Uluslararası - Kurum Öğretim Elemanıen_US
dc.rightsinfo:eu-repo/semantics/closedAccessen_US
dc.titleInvestigation of the thickness effect to impedance analysis results AlGaN acoustic sensoren_US
dc.typeConference Objecten_US

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