ZnO thin film synthesis by reactive radio frequency magnetron sputtering
Küçük Resim Yok
Tarih
2014
Dergi Başlığı
Dergi ISSN
Cilt Başlığı
Yayıncı
Elsevier B.V.
Erişim Hakkı
info:eu-repo/semantics/closedAccess
Özet
In this study, ZnO thin films were deposited on glass substrates by reactive RF magnetron sputtering method at argon-oxygen gas mixing (1:1) atmosphere. Some properties of the synthesized films were investigated by interferometry, UV-vis spectrophotometer, atomic force microscopy, and tensiometer. Tauc method was adopted to estimate the optical band gaps. The band gaps of the deposited films were affected by film thickness. We concluded that the surface composition plays a substantial role in the values of the band gaps. Nanocrystalline structures were detected in all produced samples. © 2013 Elsevier B.V. All rights reserved.
Açıklama
Anahtar Kelimeler
Optical properties, RF sputtering, Surface properties, ZnO, Atomic force microscopy, Energy gap, II-VI semiconductors, Magnetron sputtering, Metallic films, Nanocrystals, Optical films, Optical properties, Substrates, Surface properties, Zinc oxide, Deposited films, Glass substrates, Nano-crystalline structures, Reactive radio-frequency magnetron sputtering, Reactive rf magnetron sputtering, Rf-sputtering, UV-Vis spectrophotometers, ZnO thin film, Thin films, Optical properties, RF sputtering, Surface properties, ZnO, Atomic force microscopy, Energy gap, II-VI semiconductors, Magnetron sputtering, Metallic films, Nanocrystals, Optical films, Optical properties, Substrates, Surface properties, Zinc oxide, Deposited films, Glass substrates, Nano-crystalline structures, Reactive radio-frequency magnetron sputtering, Reactive rf magnetron sputtering, Rf-sputtering, UV-Vis spectrophotometers, ZnO thin film, Thin films
Kaynak
Applied Surface Science
WoS Q Değeri
Q1
Scopus Q Değeri
Q1
Cilt
318