ZnO thin film synthesis by reactive radio frequency magnetron sputtering

Küçük Resim Yok

Tarih

2014

Dergi Başlığı

Dergi ISSN

Cilt Başlığı

Yayıncı

Elsevier B.V.

Erişim Hakkı

info:eu-repo/semantics/closedAccess

Özet

In this study, ZnO thin films were deposited on glass substrates by reactive RF magnetron sputtering method at argon-oxygen gas mixing (1:1) atmosphere. Some properties of the synthesized films were investigated by interferometry, UV-vis spectrophotometer, atomic force microscopy, and tensiometer. Tauc method was adopted to estimate the optical band gaps. The band gaps of the deposited films were affected by film thickness. We concluded that the surface composition plays a substantial role in the values of the band gaps. Nanocrystalline structures were detected in all produced samples. © 2013 Elsevier B.V. All rights reserved.

Açıklama

Anahtar Kelimeler

Optical properties, RF sputtering, Surface properties, ZnO, Atomic force microscopy, Energy gap, II-VI semiconductors, Magnetron sputtering, Metallic films, Nanocrystals, Optical films, Optical properties, Substrates, Surface properties, Zinc oxide, Deposited films, Glass substrates, Nano-crystalline structures, Reactive radio-frequency magnetron sputtering, Reactive rf magnetron sputtering, Rf-sputtering, UV-Vis spectrophotometers, ZnO thin film, Thin films, Optical properties, RF sputtering, Surface properties, ZnO, Atomic force microscopy, Energy gap, II-VI semiconductors, Magnetron sputtering, Metallic films, Nanocrystals, Optical films, Optical properties, Substrates, Surface properties, Zinc oxide, Deposited films, Glass substrates, Nano-crystalline structures, Reactive radio-frequency magnetron sputtering, Reactive rf magnetron sputtering, Rf-sputtering, UV-Vis spectrophotometers, ZnO thin film, Thin films

Kaynak

Applied Surface Science

WoS Q Değeri

Q1

Scopus Q Değeri

Q1

Cilt

318

Sayı

Künye