Morphology, composition, structure and optical properties of CuO/Cu2O thin films prepared by RF sputtering method
Küçük Resim Yok
Tarih
2016
Dergi Başlığı
Dergi ISSN
Cilt Başlığı
Yayıncı
Elsevier Ltd
Erişim Hakkı
info:eu-repo/semantics/closedAccess
Özet
In this paper, copper oxide (CuO/Cu2O) nanocrystalline thin films were deposited by radio frequency (RF) magnetron sputtering system at 75 W and 100 W. The surface, optical, composition and structural properties of obtaining samples were characterized by using atomic force microscopy (AFM), UV–Vis spectrophotometer, field emission scanning electron microscopy (FESEM), energy dispersive X-ray spectroscopy (EDX) and X-ray diffraction (XRD). The optical band gaps of produced films were calculated as 2.05 eV and 1.83 eV for 75 W and 100 W. The layer's thicknesses were measured as 20 nm and 50 nm using a Filmetrics F20. FESEM images of the samples prove the AFM images change and also show homogeneity of thin films and variation relative to power change, thus revealed the surface of samples disturb in homogen mode. EDX results denote presence of Cu and O elements inside the deposited samples. © 2016
Açıklama
Anahtar Kelimeler
Compositional properties, CuO/Cu2O thin films, Energy band gap, Optical properties, Surface properties, Atomic force microscopy, Band structure, Copper oxides, Energy dispersive spectroscopy, Energy gap, Field emission microscopes, Magnetron sputtering, Nanocrystals, Optical emission spectroscopy, Optical properties, Oxide films, Scanning electron microscopy, Structural properties, Surface properties, X ray diffraction, X ray spectroscopy, AFM image, Compositional properties, Energy dispersive X ray spectroscopy, Field emission scanning electron microscopy, Nanocrystalline thin films, O elements, Radio frequency magnetron sputtering, RF sputtering method, Thin films, Compositional properties, CuO/Cu2O thin films, Energy band gap, Optical properties, Surface properties, Atomic force microscopy, Band structure, Copper oxides, Energy dispersive spectroscopy, Energy gap, Field emission microscopes, Magnetron sputtering, Nanocrystals, Optical emission spectroscopy, Optical properties, Oxide films, Scanning electron microscopy, Structural properties, Surface properties, X ray diffraction, X ray spectroscopy, AFM image, Compositional properties, Energy dispersive X ray spectroscopy, Field emission scanning electron microscopy, Nanocrystalline thin films, O elements, Radio frequency magnetron sputtering, RF sputtering method, Thin films
Kaynak
Vacuum
WoS Q Değeri
Q3
Scopus Q Değeri
Q1
Cilt
131
