Heavily carbon doped GaAs nanocrystalline thin film deposited by thermionic vacuum arc method

Küçük Resim Yok

Tarih

2016

Dergi Başlığı

Dergi ISSN

Cilt Başlığı

Yayıncı

Elsevier Ltd

Erişim Hakkı

info:eu-repo/semantics/closedAccess

Özet

In this paper, we introduced a new different thin film deposition method for heavily carbon doped GaAs. Used method is thermionic vacuum arc (TVA) and first used for the carbon doping process. The method is very fast deposition process for the other growth method such as metal organic chemical vapor deposition, molecular beam epitaxy, molecular organic molecular beam epitaxy. The smallest grain size of GaAs and doped GaAs were obtained by carbon doping process. Mean crystalline size and height of crystalline size were found to be 3.4 nm and 4 nm, respectively. Crystal direction was found to be (022) plane and (024) plane for the sample at 45.322° and 75.060°, respectively. The production process and obtained results show that used methods is very simple, low cost, eco friendly and very fast method for the carbon doped GaAs. © 2015 Elsevier B.V.

Açıklama

Anahtar Kelimeler

C doped GaAs, Optical analyses, Optical properties, Surface properties, Chemical beam epitaxy, Crystalline materials, Deposition, Epitaxial growth, Gallium arsenide, Metallorganic chemical vapor deposition, Molecular beam epitaxy, Molecular beams, Nanocrystals, Optical properties, Organic chemicals, Organometallics, Semiconducting gallium, Semiconductor doping, Surface properties, Thin films, Vacuum applications, Vacuum technology, GaAs, Nanocrystalline thin films, Optical analysis, Organic molecular beam epitaxy, Production process, Thermionic vacuum arc, Thermionic vacuum arc methods, Thin-film depositions, Vapor deposition, C doped GaAs, Optical analyses, Optical properties, Surface properties, Chemical beam epitaxy, Crystalline materials, Deposition, Epitaxial growth, Gallium arsenide, Metallorganic chemical vapor deposition, Molecular beam epitaxy, Molecular beams, Nanocrystals, Optical properties, Organic chemicals, Organometallics, Semiconducting gallium, Semiconductor doping, Surface properties, Thin films, Vacuum applications, Vacuum technology, GaAs, Nanocrystalline thin films, Optical analysis, Organic molecular beam epitaxy, Production process, Thermionic vacuum arc, Thermionic vacuum arc methods, Thin-film depositions, Vapor deposition

Kaynak

Journal of Alloys and Compounds

WoS Q Değeri

Q1

Scopus Q Değeri

Q1

Cilt

657

Sayı

Künye