A study on optical, morphological and mechanical properties of Al2O3 ultra-thin films deposited by RF reactive magnetron sputtering
Küçük Resim Yok
Tarih
2015
Dergi Başlığı
Dergi ISSN
Cilt Başlığı
Yayıncı
Inderscience Enterprises Ltd.
Erişim Hakkı
info:eu-repo/semantics/closedAccess
Özet
The Al2O3 ultra-thin films with the thicknesses of 30 nm and 35 nm were deposited on glass microscope slides by a radio frequency reactive magnetron sputtering system. The optical, morphological and mechanical properties were investigated as function of the film thickness. The refractive index of the resulting Al2O3 ultra-thin film increased with the increasing thickness. Both the films showed high transparency of > 85% and low reflectivity of < 10% in the visible and near infrared region. A band gap of ?8.65 eV was obtained for the 30 nm film and ?7.53 eV for the 35 nm film from an empirical relation between refractive index and band gap. According to the results obtained from the AFM studies, the root mean square surface roughness of the films are 3.67 nm and 3.77 nm for the 30 nm and 35 nm film, respectively. The hardness and Young modulus values decreased with the increasing film thickness. Copyright © 2015 Inderscience Enterprises Ltd.
Açıklama
Anahtar Kelimeler
AFM, Al2O3 ultra-thin films, Optical properties, RF magnetron sputtering, Aluminum, Energy gap, Film thickness, Infrared devices, Magnetron sputtering, Mechanical properties, Optical properties, Refractive index, Sputtering, Surface roughness, Thin films, Ultrathin films, AFM, Empirical relations, Glass microscope slides, Radio frequency reactive magnetron sputtering, Refractive index and band gap, RF reactive magnetron sputtering, rf-Magnetron sputtering, Visible and near infrared, Optical films, AFM, Al2O3 ultra-thin films, Optical properties, RF magnetron sputtering, Aluminum, Energy gap, Film thickness, Infrared devices, Magnetron sputtering, Mechanical properties, Optical properties, Refractive index, Sputtering, Surface roughness, Thin films, Ultrathin films, AFM, Empirical relations, Glass microscope slides, Radio frequency reactive magnetron sputtering, Refractive index and band gap, RF reactive magnetron sputtering, rf-Magnetron sputtering, Visible and near infrared, Optical films
Kaynak
International Journal of Surface Science and Engineering
WoS Q Değeri
Q4
Scopus Q Değeri
Q3
Cilt
9
Sayı
5
