The surface morphology research of the BGaN thin films deposited by thermionic vacuum arc

Küçük Resim Yok

Tarih

2017

Dergi Başlığı

Dergi ISSN

Cilt Başlığı

Yayıncı

Elsevier Ltd

Erişim Hakkı

info:eu-repo/semantics/closedAccess

Özet

In this paper, BGaN thin films with two different thicknesses were deposited on two different substrates and their surface morphologies were investigated. The amorphous glass and semi-crystalline polyethylene terephthalate substrates were selected. At the same time, two different deposition angles are selected with a view to the effect of deposition angle on surface morphology. The surface and optical properties were determined by using X-ray diffractometer (XRD), atomic force microscope (AFM), spectroscopic ellipsometry (SE) and optical interferometer. The thicknesses of thin films on substrates are about 30 nm and 40 nm. According to the atomic force microscope images, small-dimensional grains observed on relatively large grains. The roughness values of the thin films on the polyethylene terephthalate substrate are lower than on the glass substrate. © 2016 Elsevier Ltd

Açıklama

Anahtar Kelimeler

GaN thin film, Refractive index, Surface properties, Thermionic vacuum arc, XRD, Atomic force microscopy, Deposition, Glass, Morphology, Optical properties, Plastic bottles, Polyethylene terephthalates, Refractive index, Spectroscopic ellipsometry, Substrates, Surface morphology, Surface properties, Vacuum applications, Vacuum technology, Atomic force microscope images, Deposition angle, Different substrates, GaN thin films, Optical interferometer, Semicrystallines, Thermionic vacuum arc, X ray diffractometers, Thin films, GaN thin film, Refractive index, Surface properties, Thermionic vacuum arc, XRD, Atomic force microscopy, Deposition, Glass, Morphology, Optical properties, Plastic bottles, Polyethylene terephthalates, Refractive index, Spectroscopic ellipsometry, Substrates, Surface morphology, Surface properties, Vacuum applications, Vacuum technology, Atomic force microscope images, Deposition angle, Different substrates, GaN thin films, Optical interferometer, Semicrystallines, Thermionic vacuum arc, X ray diffractometers, Thin films

Kaynak

Vacuum

WoS Q Değeri

Q2

Scopus Q Değeri

Q1

Cilt

135

Sayı

Künye