The surface morphology research of the BGaN thin films deposited by thermionic vacuum arc
Küçük Resim Yok
Tarih
2017
Yazarlar
Dergi Başlığı
Dergi ISSN
Cilt Başlığı
Yayıncı
Elsevier Ltd
Erişim Hakkı
info:eu-repo/semantics/closedAccess
Özet
In this paper, BGaN thin films with two different thicknesses were deposited on two different substrates and their surface morphologies were investigated. The amorphous glass and semi-crystalline polyethylene terephthalate substrates were selected. At the same time, two different deposition angles are selected with a view to the effect of deposition angle on surface morphology. The surface and optical properties were determined by using X-ray diffractometer (XRD), atomic force microscope (AFM), spectroscopic ellipsometry (SE) and optical interferometer. The thicknesses of thin films on substrates are about 30 nm and 40 nm. According to the atomic force microscope images, small-dimensional grains observed on relatively large grains. The roughness values of the thin films on the polyethylene terephthalate substrate are lower than on the glass substrate. © 2016 Elsevier Ltd
Açıklama
Anahtar Kelimeler
GaN thin film, Refractive index, Surface properties, Thermionic vacuum arc, XRD, Atomic force microscopy, Deposition, Glass, Morphology, Optical properties, Plastic bottles, Polyethylene terephthalates, Refractive index, Spectroscopic ellipsometry, Substrates, Surface morphology, Surface properties, Vacuum applications, Vacuum technology, Atomic force microscope images, Deposition angle, Different substrates, GaN thin films, Optical interferometer, Semicrystallines, Thermionic vacuum arc, X ray diffractometers, Thin films, GaN thin film, Refractive index, Surface properties, Thermionic vacuum arc, XRD, Atomic force microscopy, Deposition, Glass, Morphology, Optical properties, Plastic bottles, Polyethylene terephthalates, Refractive index, Spectroscopic ellipsometry, Substrates, Surface morphology, Surface properties, Vacuum applications, Vacuum technology, Atomic force microscope images, Deposition angle, Different substrates, GaN thin films, Optical interferometer, Semicrystallines, Thermionic vacuum arc, X ray diffractometers, Thin films
Kaynak
Vacuum
WoS Q Değeri
Q2
Scopus Q Değeri
Q1
Cilt
135
