The surface morphology research of the BGaN thin films deposited by thermionic vacuum arc

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dc.authorid55897767500
dc.authorid9274843500
dc.authorid55897416100
dc.authorid7003415405
dc.contributor.authorÖzen S.
dc.contributor.authorPat S.
dc.contributor.authorŞenay V.
dc.contributor.authorKorkmaz Ş.
dc.date.accessioned20.04.201910:49:12
dc.date.accessioned2019-04-20T21:43:25Z
dc.date.available20.04.201910:49:12
dc.date.available2019-04-20T21:43:25Z
dc.date.issued2017
dc.departmentBayburt Üniversitesien_US
dc.description.abstractIn this paper, BGaN thin films with two different thicknesses were deposited on two different substrates and their surface morphologies were investigated. The amorphous glass and semi-crystalline polyethylene terephthalate substrates were selected. At the same time, two different deposition angles are selected with a view to the effect of deposition angle on surface morphology. The surface and optical properties were determined by using X-ray diffractometer (XRD), atomic force microscope (AFM), spectroscopic ellipsometry (SE) and optical interferometer. The thicknesses of thin films on substrates are about 30 nm and 40 nm. According to the atomic force microscope images, small-dimensional grains observed on relatively large grains. The roughness values of the thin films on the polyethylene terephthalate substrate are lower than on the glass substrate. © 2016 Elsevier Ltden_US
dc.identifier.doi10.1016/j.vacuum.2016.10.033
dc.identifier.endpage54
dc.identifier.issn0042-207X
dc.identifier.scopus2-s2.0-84993995159en_US
dc.identifier.scopusqualityQ1en_US
dc.identifier.startpage50
dc.identifier.urihttps://dx.doi.org/10.1016/j.vacuum.2016.10.033
dc.identifier.urihttps://hdl.handle.net/20.500.12403/550
dc.identifier.volume135
dc.identifier.wosWOS:000390518800008en_US
dc.identifier.wosqualityQ2en_US
dc.indekslendigikaynakWeb of Scienceen_US
dc.indekslendigikaynakScopusen_US
dc.language.isoenen_US
dc.publisherElsevier Ltd
dc.relation.ispartofVacuumen_US
dc.relation.publicationcategoryMakale - Uluslararası Hakemli Dergi - Kurum Öğretim Elemanıen_US
dc.rightsinfo:eu-repo/semantics/closedAccessen_US
dc.subjectGaN thin film
dc.subjectRefractive index
dc.subjectSurface properties
dc.subjectThermionic vacuum arc
dc.subjectXRD
dc.subjectAtomic force microscopy
dc.subjectDeposition
dc.subjectGlass
dc.subjectMorphology
dc.subjectOptical properties
dc.subjectPlastic bottles
dc.subjectPolyethylene terephthalates
dc.subjectRefractive index
dc.subjectSpectroscopic ellipsometry
dc.subjectSubstrates
dc.subjectSurface morphology
dc.subjectSurface properties
dc.subjectVacuum applications
dc.subjectVacuum technology
dc.subjectAtomic force microscope images
dc.subjectDeposition angle
dc.subjectDifferent substrates
dc.subjectGaN thin films
dc.subjectOptical interferometer
dc.subjectSemicrystallines
dc.subjectThermionic vacuum arc
dc.subjectX ray diffractometers
dc.subjectThin films
dc.subjectGaN thin film
dc.subjectRefractive index
dc.subjectSurface properties
dc.subjectThermionic vacuum arc
dc.subjectXRD
dc.subjectAtomic force microscopy
dc.subjectDeposition
dc.subjectGlass
dc.subjectMorphology
dc.subjectOptical properties
dc.subjectPlastic bottles
dc.subjectPolyethylene terephthalates
dc.subjectRefractive index
dc.subjectSpectroscopic ellipsometry
dc.subjectSubstrates
dc.subjectSurface morphology
dc.subjectSurface properties
dc.subjectVacuum applications
dc.subjectVacuum technology
dc.subjectAtomic force microscope images
dc.subjectDeposition angle
dc.subjectDifferent substrates
dc.subjectGaN thin films
dc.subjectOptical interferometer
dc.subjectSemicrystallines
dc.subjectThermionic vacuum arc
dc.subjectX ray diffractometers
dc.subjectThin films
dc.titleThe surface morphology research of the BGaN thin films deposited by thermionic vacuum arcen_US
dc.typeArticleen_US

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