Some physical properties of the SiGe thin film coatings by thermionic vacuum arc (TVA)

Küçük Resim Yok

Tarih

2015

Dergi Başlığı

Dergi ISSN

Cilt Başlığı

Yayıncı

American Scientific Publishers

Erişim Hakkı

info:eu-repo/semantics/closedAccess

Özet

SiGe thin films were deposited on glass and PET substrate by the thermionic vacuum arc (TVA) method for the first time. TVA is an anodic plasma generator which works in high vacuum conditions. Highly pure and quality films can be deposited on different substrates by means of this method. In order to characterize the produced films, X-ray diffraction, field emission scanning electron microscope (FESEM), atomic force microscope (AFM), energy dispersive X-ray spectrometer (EDX), optical tensiometer, UV-Vis spectrophotometer and spectroscopic ellipsometer (SE) devices were used. The obtained XRD peaks at 47° and 75° are described to the reflections of (220) and (331) planes of Ge or Si. According to the measurement results, substrates materials are affect the surface and optical properties of the deposited SiGe layers. SiGe coated samples with low optical band gaps exhibit low transparency and high absorption. The structures are homogenous and less rough. Copyright © 2015 American Scientific Publishers All rights reserved.

Açıklama

Anahtar Kelimeler

AFM, FESEM, Optical properties, SiGe thin films, TVA, XRD, Atomic force microscopy, Energy gap, Germanium, Scanning electron microscopy, Silicon alloys, Spectrometers, Substrates, Thin films, Vacuum applications, Vacuum technology, X ray diffraction, X ray spectrometers, AFM, FESEM, SiGe thin film, TVA, XRD, Optical properties, AFM, FESEM, Optical properties, SiGe thin films, TVA, XRD, Atomic force microscopy, Energy gap, Germanium, Scanning electron microscopy, Silicon alloys, Spectrometers, Substrates, Thin films, Vacuum applications, Vacuum technology, X ray diffraction, X ray spectrometers, AFM, FESEM, SiGe thin film, TVA, XRD, Optical properties

Kaynak

Journal of Nanoelectronics and Optoelectronics

WoS Q Değeri

Q3

Scopus Q Değeri

N/A

Cilt

10

Sayı

1

Künye