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A new method for titania thin film production: Thermionic vacuum arc method 

Şenay V.; Özen S.; Pat S.; Geçici B.; Korkmaz Ş. (SAGE Publications Ltd, 2017)
In this research, transparent titania (TiO2) thin films were deposited on a glass microscope slide and on a flexible polyethylene terephthalate (PET) substrate under a high vacuum condition by means of the thermionic vacuum ...

Optical and Surface Characteristics of Mg-Doped GaAs Nanocrystalline Thin Film Deposited by Thermionic Vacuum Arc Technique 

Pat S.; Özen S.; Şenay V.; Korkmaz Ş. (Springer New York LLC, 2017)
Magnesium (Mg) is the most promising p-type dopant for gallium arsenide (GaAs) semiconductor technology. Mg-doped GaAs nanocrystalline thin film has been deposited at room temperature by the thermionic vacuum arc technique, ...

The substrate effect on Ge doped GaN thin films coated by thermionic vacuum arc 

Özen S.; Korkmaz Ş.; Şenay V.; Pat S. (Springer New York LLC, 2017)
This study focuses on characterization and understanding of the substrate effect on Ge doped GaN thin films coated onto transparent substrates. The produced films were deposited onto unheated glass and unheated polyethylene ...

A study on some physical properties of a Pb-doped GaAs thin film produced by thermionic vacuum arc 

Şenay V.; Özen S.; Pat S.; Korkmaz Ş. (Elsevier Ltd, 2017)
A 155 nm Pb-doped GaAs thin film was deposited on a glass substrate by means of the thermionic vacuum arc technique in 30 s using GaAs and Pb pellets as source materials. Tools and techniques such as an optical reflectometer, ...

The surface morphology research of the BGaN thin films deposited by thermionic vacuum arc 

Özen S.; Pat S.; Şenay V.; Korkmaz Ş. (Elsevier Ltd, 2017)
In this paper, BGaN thin films with two different thicknesses were deposited on two different substrates and their surface morphologies were investigated. The amorphous glass and semi-crystalline polyethylene terephthalate ...

Optical, structural, morphological and compositional characterization of a Co-doped GaAs semiconducting thin film produced by thermionic vacuum arc 

Şenay V.; Özen S.; Pat S.; Korkmaz Ş. (Elsevier Ltd, 2016)
A 80 nm 2 at% Co-doped GaAs thin film was deposited on a glass substrate under a high vacuum condition by means of the thermionic vacuum arc technique using GaAs and Co pellets as source materials. Tools and techniques ...

Heavily carbon doped GaAs nanocrystalline thin film deposited by thermionic vacuum arc method 

Pat S.; Korkmaz Ş.; Özen S.; Şenay V. (Elsevier Ltd, 2016)
In this paper, we introduced a new different thin film deposition method for heavily carbon doped GaAs. Used method is thermionic vacuum arc (TVA) and first used for the carbon doping process. The method is very fast ...

Optical, morphological and mechanical properties of an Al-Al2O3 nanocomposite thin film grown by thermionic vacuum arc 

Şenay V.; Özen S.; Pat S.; Korkmaz Ş. (Elsevier GmbH, 2016)
An Al-Al2O3 nanocomposite thin film was deposited onto a glass substrate in high vacuum condition using Al2O3 pellets as source material by means of the thermionic vacuum arc technique in just 50 s. UV-visible spectrophotometer, ...

The influence of voltage applied between the electrodes on optical and morphological properties of the InGaN thin films grown by thermionic vacuum arc 

Özen S.; Şenay V.; Pat S.; Korkmaz Ş. (John Wiley and Sons Inc., 2016)
The aim of this research is to investigate the optical and morphological properties of the InGaN thin films deposited onto amorphous glass substrates in two separate experiments with two different voltages applied between ...

Characterization of a fast grown GaAs:Sn thin film by thermionic vacuum arc 

Özen S.; Şenay V.; Pat S.; Korkmaz Ş. (Springer New York LLC, 2015)
In this research, a tin doped gallium arsenide thin film was grown on a glass substrate by means of the TVA technique in a very short period of time (70 s) and it’s morphological, compositional, and optical properties were ...
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AuthorKorkmaz Ş. (15)
Pat S. (15)
Özen S. (15)Şenay V. (15)Geçici B. (2)Subject
Thin films (15)
Vacuum applications (15)
Vacuum technology (14)Thermionic vacuum arc (12)Atomic force microscopy (10)... View MoreDate Issued2015 (6)2017 (5)2016 (4)Full Text StatusWithout Full Text (15)

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